Used in the manufacture of semiconductors, LCD panels and solar panels. Provides DC voltage for a wide range of applications including the formation of optical films (SiO2, TiOx), which require high-speed arc shutoff; anti-wear films (SiOx, Al203); and transparent conductive films (ITO). Also compatible with arcless reactive sputter.

Photo: Left, HPK Series, 15 kW model, Photo: Right, 45 kW model, Master-Slave configuration

		CPU-based numerical control and communications functions for ease of operation.
		Ideally suited to the supply of DC voltage over a wide range of power ratings and high-speed arc isolation function indispensable for optical film (SiO2,TiOx, wear-resistant film (SiOx,Al2O3) and indium tin oxide (ITO) film growth.
		Accommodates RF system coupling.