Oscillation frequency	13.56MHz
Rated output	30kW
Harmonic distortion rate	-40dB or lower
Output method	MOS-FET Method
Output connector	EIA1-5/8 type
Input voltage	Three-phase 200/220V
Input power	50.0kVA or less
Cooling method	RF water cooling (12liters/minute) DC water cooling (6liters/minute)
Dimension	RF 480W×720D×300H (mm) (Not including protruding parts) DC 480W×730D×300H (mm) (Not including protruding parts)
Weight	RF 85kg DC 95kg