Oscillation frequency	13.56MHz
Rated output	25kW
Harmonic distortion rate	-45dB
Output method	MOS-FET Method
Output connector	EIA1-5/8 type
Input voltage	Three-phase 200/220V
Input power	39.0 kVA or less
Cooling method	water cooling (8liters/minute)
Dimension	RF 480W×680D×300H (mm) (Not including protruding parts) DC 480W×680D×250H (mm) (Not including protruding parts)
Weight	RF 90kg DC 65kg