Oscillation frequency	13.56MHz
Rated output	20kW
Harmonic distortion rate	-45dB
Output method	MOS-FET Method
Output connector	EIA1-5/8 type
Input voltage	Three-phase 200/220V
Input power	32.0kVA or less
Cooling method	water cooling (8liters/minute)
Dimension	RF 480W×600D×300H (mm) (Not including protruding parts) DC 480W×600D×200H (mm) (Not including protruding parts)
Weight	RF 80kg DC 60kg