Oscillation frequency	13.56MＨｚ
Rated output	20kW
Harmonic distortion rate	-45dB or lower
Output method	MOS-FET Method
Output connector	EIA1-5/8 type
Input voltage	Three-phase 400/440V
Input power	32.0kVA or less
Cooling method	water cooling (8liters/minute)
Dimension	480W×660D×220H (mm) (Not including protruding parts)
Weight	70kg