Oscillation frequency	13.56MHz
Rated output	15kW
Harmonic distortion rate	-45dB or lower
Output method	MOS-FET Method
Output connector	EIA 7/8 type
Input voltage	Three-phase 200/220V
Input power	25.0kVA or less
Cooling method	water cooling (8liters/minute)
Dimension	RF 480W×600D×350H (mm) (Not including protruding parts) DC 480W×600D×150H (mm) (Not including protruding parts)
Weight	RF 60kg DC 45kg