Oscillation frequency	13.56MHz
Rated output	3kW
Harmonic distortion rate	-45dB or lower
Output method	MOS-FET Method
Output connector	HＮ type
Input voltage	Three-phase 200/220V
Input power	5.0kVA or less
Cooling method	water cooling (4 liters/minute)
Dimension	240W×460D×150H (mm) (Not including protruding parts)
Weight	18kg