Oscillation frequency	4MHz
Rated output	20kW
Harmonic distortion rate	-45dB or lower
Output method	MOS-FET Method
Output connector	EIA 1-5/8 type
Input voltage	Three-phase 200/220V
Input power	32.0kVA or less
Cooling method	water cooling (8 liters/minute)
Dimension	RF 480W×680D×350H (mm) (Not including protruding parts) DC 480W×680D×200H　(mm)　(Not including protruding parts)
Weight	RF 68kg DC 52kg